3 Patents
- US125990402026Three-dimensional Integrated Circuit Structure and a Method of Fabricating the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US123982922025Method for Preparing Polishing Slurry and Polishing Method Using Same
Research & Business Foundation Sungkyunkwan University
0 cites - US118137142023Chemical Mechanical Polishing Pad and Chemical Mechanical Polishing Apparatus Including the Same
Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
0 cites