8 Patents
- US126032632026Apparatuses and Techniques for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites - US125936412026Apparatuses for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites - 1 cite
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- US123314022025Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites - US120000472024Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites - US119202392024Minimizing Radical Recombination Using ALD Silicon Oxide Surface Coating with Intermittent Restoration Plasma
Lam Research Corporation
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