Patents/Inventors

Mitsuru Miyazaki

TokyoJP20 patents

18 Patents

US125945832026
Substrate Cleaning Device, Substrate Processing Device, and Maintenance Method for Substrate Cleaning Device
EBARA CORPORATION
0 cites
US125326942026
Substrate Cleaning Device and Substrate Processing Device
EBARA CORPORATION
0 cites
US124630622025
Substrate Processing Apparatus, Computer-readable Storage Medium Storing a Program, and Substrate Processing Method
EBARA CORPORATION
0 cites
US123705782025
Substrate Cleaning Apparatus and Substrate Cleaning Method
EBARA CORPORATION
0 cites
US123507872025
Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US122058312025
Cleaning Apparatus and Polishing Apparatus
EBARA CORPORATION
0 cites
US121005872024
Substrate Cleaning Apparatus and Cleaning Method of Substrate
EBARA CORPORATION
0 cites
US120947542024
Substrate Supporting Apparatus and Method of Controlling Substrate Supporting Apparatus
EBARA CORPORATION
0 cites
US120538512024
Jig and Installation Method Using Same Jig
EBARA CORPORATION
0 cites
US120465002024
Transport Apparatus and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US119675082024
Damper Control System and Damper Control Method
EBARA CORPORATION
0 cites
US119488112024
Cleaning Apparatus and Polishing Apparatus
EBARA CORPORATION
0 cites
US119488272024
Substrate Support Mechanism, Substrate Cleaning Device and Substrate Processing Method
EBARA CORPORATION
0 cites
US118942442024
Cleaning Member Mounting Mechanism and Substrate Cleaning Apparatus
EBARA CORPORATION
0 cites
US118465362023
Sensor Target Cover Used in Combination with Liquid Level Detection Sensor, Wet Processing Device, Substrate Processing Device, and Sensor Assembly
EBARA CORPORATION
0 cites
US117667562023
Substrate Support Apparatus and Substrate Cleaning Apparatus
EBARA CORPORATION
0 cites
US117312402023
Substrate Processing Apparatus
EBARA CORPORATION
0 cites
USD09928452023
Roller Shaft for Substrate Cleaning
EBARA CORPORATION
0 cites