Roller Shaft for Substrate Cleaning

FIG. 1 is a left side view of a roller shaft for substrate cleaning showing our new design;

FIG. 2 is a right side view thereof;

FIG. 3 is a front view thereof, including a detail view of a portion thereof;

FIG. 4 is a top view thereof, including a detail view of a portion thereof;

FIG. 5 is a cross-section view thereof, taken along the line 5 - 5 of FIG. 1 ;

FIG. 6 is an enlarged top perspective view; and,

FIG. 7 is an enlarged left side view thereof.

The broken lines in the figures show portions of the roller shaft that form no part of the claimed design.