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Inventors
Mikio Nakashima
Kumamoto
JP
8 patents
4 Patents
US12622200
2026
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US12283495
2025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US11880213
2024
Substrate Liquid Processing Apparatus and Substrate Liquid Processing Method
Tokyo Electron Limited
0 cites
US11780303
2023
Striker Mounting Structure
TOYOTA JIDOSHA KABUSHIKI KAISHA
0 cites