Patents/Inventors

Masaki Hirayama

TokyoJP23 patents

16 Patents

US126205632026
Plasma Processing Apparatus and Plasma Processing Method
TOHOKU UNIVERSITY
0 cites
US125975892026
Electrostatic Chuck
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US125371672026
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124889642025
Plasma Processing Apparatus and Plasma Processing Method
Tohoku University
0 cites
US124826312025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124513262025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US124379722025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122494922025
Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US121192122024
Wafer Support Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US120875522024
Plasma Processing Apparatus and Plasma Processing Method
TOHOKU UNIVERSITY
0 cites
US120515642024
Shower Plate, Plasma Processing Apparatus and Plasma Processing Method
TOHOKU UNIVERSITY
0 cites
US119903162024
Plasma Processing Apparatus and Plasma Processing Method
TOHOKU UNIVERSITY
0 cites
US119292342024
Plasma Processing Apparatus and Lower Stage
TOHOKU UNIVERSITY
0 cites
US119231702024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US118547722023
Plasma Processing Apparatus and Plasma Processing Method
TOHOKU UNIVERSITY
0 cites
US116876432023
Information Linkage System and Information Linkage Method
HITACHI, Ltd.
0 cites