20 Patents
- 0 cites
- 0 cites
- 0 cites
- US121761902024Arc Management Algorithm of RF Generator and Match Box for CCP Plasma Chambers
APPLIED MATERIALS, Inc.
0 cites - US120946992024Methods and Apparatus for Controlling Ion Fraction in Physical Vapor Deposition Processes
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- US120149062024High Temperature Detachable Very High Frequency (VHF) Electrostatic Chuck (ESC) for PVD Chamber
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- US118681472024Optical Emission Spectroscopy Control of Gas Flow in Processing Chambers
Applied Materials, Inc.
0 cites - 0 cites
- US118107702023Methods and Apparatus for Controlling Ion Fraction in Physical Vapor Deposition Processes
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- 0 cites
- US116704932023Isolator Ring Clamp and Physical Vapor Deposition Chamber Incorporating Same
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- 0 cites