Collimator for a Physical Vapor Deposition Chamber

FIG. 1 is a top perspective view of collimator for a physical vapor deposition chamber showing our new design.

FIG. 2 is a bottom perspective view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a right side elevation view thereof.

FIG. 6 is a left side elevation view thereof.

FIG. 7 is a front elevation view thereof.

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is a cross-sectional view taken along line 9 - 9 in FIG. 3 .

The broken lines in the drawings illustrate environment of the collimator for a physical vapor deposition chamber that form no part of the claimed design.