3 Patents
- US125911332026Enhanced Microelectromechanical System Mirror Apparatus
Teknologian Tutkimuskeskus VTT Oy
0 cites - 0 cites
- US117672182023Microelectromechanical Capacitive Pressure Sensor Having a Valve Portion Being Operable to Close First Output and Open Second Output to Equalize Pressure
Teknologian Tutkimuskeskus VTT Oy
0 cites