Patents/Inventors

Daniel Sang Byun

Campbell, CAUS9 patents

10 Patents

US123548472025
Methods and Apparatus for Conductance Liners in Semiconductor Process Chambers
APPLIED MATERIALS, Inc.
0 cites
US122550512025
Multi-shape Voltage Pulse Trains for Uniformity and Etch Profile Tuning
Applied Materials, Inc.
0 cites
USD10662752025
Baffle for Anti-rotation Process Kit for Substrate Processing Chamber
APPLIED MATERIALS, Inc.
0 cites
US122371482025
Plasma Processing Assembly Using Pulsed-voltage and Radio-frequency Power
Applied Materials, Inc.
0 cites
USD10490672024
Ring for an Anti-rotation Process Kit for a Substrate Processing Chamber
APPLIED MATERIALS, Inc.
0 cites
US120092362024
Sensors and System for In-situ Edge Ring Erosion Monitor
Applied Materials, Inc.
0 cites
US118942552024
Sheath and Temperature Control of Process Kit
APPLIED MATERIALS, Inc.
0 cites
US118481762023
Plasma Processing Using Pulsed-voltage and Radio-frequency Power
Applied Materials, Inc.
0 cites
US117767892023
Plasma Processing Assembly Using Pulsed-voltage and Radio-frequency Power
Applied Materials, Inc.
0 cites
US117640412023
Adjustable Thermal Break in a Substrate Support
Applied Materials, Inc.
0 cites