24 Patents
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- US125936412026Apparatuses for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites - 1 cite
- US125629462026Cyclic Shift Diversity Sequence-based Communication Method, Apparatus, and System
HUAWEI TECHNOLOGIES CO., Ltd.
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- US124201242025Three-dimensional Wildfire Monitoring and Control Method and System for Power Transmission Corridor
ELECTRIC POWER RESEARCH INSTITUTE OF GUANGDONG POWER GRID CO., Ltd.
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- US123593112025Conformal Deposition of Silicon Carbide Films Using Heterogeneous Precursor Interaction
Lam Research Corporation
0 cites - US123314022025Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites - US123343322025Remote Plasma Based Deposition of Silicon Carbide Films Using Silicon-containing and Carbon-containing Precursors
Lam Research Corporation
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- US123004882025Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill
Lam Research Corporation
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- US122278372025Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites - US121632192024Ex Situ Coating of Chamber Components for Semiconductor Processing
Lam Research Corporation
0 cites - US121251252024Method and Device for Text-based Image Generation
Ping An Technology (Shenzhen) Co., Ltd.
0 cites - US120000472024Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites - US119202392024Minimizing Radical Recombination Using ALD Silicon Oxide Surface Coating with Intermittent Restoration Plasma
Lam Research Corporation
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- US118481992023Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill
Lam Research Corporation
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- US116575992023Method for Detecting Appearance of Six Sides of Chip Multi-layer Ceramic Capacitor Based on Artificial Intelligence
ZHUHAI AUTOVISION TECHNOLOGY Co. Ltd.
0 cites - US116085592023Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites