- US12051638utility2024Integrated High Efficiency Transistor Cooling0 cites
- US12051587utility2024Substrate Processing Apparatus, Estimation Method of Substrate Processing and Recording Medium0 cites
- US12042815utility2024Substrate Processing Apparatus for Supplying Gas of Water Repellent Agent and Substrate Processing Method0 cites
- US12044973utility2024Substrate Processing Apparatus and Substrate Processing Method0 cites
- US12046455utility2024Shower Plate, Lower Dielectric Member and Plasma Processing Apparatus0 cites
- US12046452utility2024Plasma Processing Apparatus0 cites
- US12046453utility2024Plasma Processing Apparatus0 cites
- US12046485utility2024Substrate Processing Apparatus and Method of Cleaning Substrate Processing Apparatus0 cites
- US12046454utility2024Performance Calculation Method and Processing Apparatus0 cites
- US12046457utility2024Electrostatic Chuck, Focus Ring, Support Base, Plasma Processing Apparatus, and Plasma Processing Method0 cites
- US12040198utility2024Inner Wall and Substrate Processing Apparatus0 cites
- US12036573utility2024Coating Film Forming Method and Coating Film Forming Apparatus0 cites
- US12036585utility2024Substrate Processing Apparatus0 cites
- US12037246utility2024Method for Detecting Abnormal Growth of Graphene, Measurement Apparatus, and Film Formation System0 cites
- US12037517utility2024Ruthenium CMP Chemistry Based on Halogenation0 cites
- US12040166utility2024Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method0 cites
- US12040176utility2024Technologies for High Aspect Ratio Carbon Etching with Inserted Charge Dissipation Layer0 cites
- US12040202utility2024Processing System0 cites
- US12040236utility20243D Devices with 3D Diffusion Breaks and Method of Forming the Same0 cites
- US12040271utility2024Power Delivery Network for CFET with Buried Power Rails0 cites