Patents/Assignees

TOKYO ELECTRON LIMITED

1,902 patents in portfolio

US12243758utility2025
Monitoring System for a Sealing Apparatus Having a Substrate Treatment Apparatus in a Housing Utilizing a Laser Sensor Installed in a Space Between the Housing and the Substrate Treatment Apparatus and That Scans a Detection Region Therein
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US12243749utility2025
Methods to Provide Uniform Wet Etching of Material Within High Aspect Ratio Features Provided on a Patterned Substrate
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US12243728utility2025
Substrate Holding Method and Substrate Processing Apparatus
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US12243723utility2025
Plasma Processing Apparatus
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US12243716utility2025
Plasma Processing Apparatus
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US12243213utility2025
Substrate Inspection Device, Substrate Inspection System, and Substrate Inspection Method
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US12241155utility2025
Method for Forming Insulation Film
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US12237178utility2025
Substrate Processing Apparatus and Substrate Processing Method
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US12237333utility2025
Power Wall Integration for Multiple Stacked Devices
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US12237216utility2025
Method for Filling Recessed Features in Semiconductor Devices with a Low-resistivity Metal
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US12237177utility2025
Substrate Processing Apparatus and Substrate Processing Method
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US12237173utility2025
Substrate Processing Method, Substrate Processing Apparatus and Substrate Processing System
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US12237172utility2025
Etch Process for Oxide of Alkaline Earth Metal
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US12237167utility2025
Deposition Method
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US12237166utility2025
Methods for Selective Removal of Surface Oxides on Metal Films
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US12237157utility2025
Plasma Measurement Method
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US12235045utility2025
Magnetic Annealing Equipment and Method
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US12234094utility2025
Substrate Holder and Substrate Processing Apparatus
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US12230540utility2025
Substrate Processing System and Substrate Processing Method
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US12230523utility2025
Substrate Processing Apparatus and Image Capturing Method
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