Patents/Assignees

TOKYO ELECTRON LIMITED

1,902 patents in portfolio

US12398324utility2025
Methods for Controlling the Pitch of Self-assembled Ionic Liquid Crystal (ILC) Structures
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US12398152utility2025
Thioxanthone Derivatives, Composition Comprising the Same and Pattern Forming Method Comprising Said Composition
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US12397375utility2025
Processing Apparatus and Processing Method
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US12394629utility2025
Plasma Processing Methods Using Low Frequency Bias Pulses
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US12394749utility2025
Bonding System and Surface Modification Method
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US12394656utility2025
Mounting Table and Substrate Processing Apparatus
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US12394645utility2025
Substrate Processing System and Method of Teaching Transfer Device
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US12394632utility2025
Plasma Processing Method and Plasma Processing System
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US12394618utility2025
Method of Adjusting Wafer Shape Using Multi-directional Actuation Films
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US12394607utility2025
Attracting Method
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US12394605utility2025
Plasma Processing System and Edge Ring Replacement Method
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US12394600utility2025
Balanced RF Resonant Antenna System
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US12394599utility2025
Plasma Processing Apparatus and Plasma Processing Method
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US12393125utility2025
Coaxial See-through Inspection System
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US12393121utility2025
Point-of-use Blending of Rinse Solutions for EUV Processing to Mitigate Pattern Collapse
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US12392033utility2025
Substrate Processing Apparatus and Substrate Processing Method
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US12392029utility2025
Titanium Nitride Film Forming Method and Titanium Nitride Film Forming Apparatus
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US12392026utility2025
Method and Device for Substrate Processing
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US12391472utility2025
Substrate Processing Apparatus and Substrate Processing Method
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US12387955utility2025
Substrate Processing Apparatus and Substrate Processing Method
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