Patents/Assignees

SHIBAURA MECHATRONICS CORPORATION

28 patents in portfolio

US12532709utility2026
Substrate Processing Apparatus
0 cites
US12472534utility2025
Substrate Processing Apparatus
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US12412756utility2025
Processing Liquid Supply Device, Substrate Processing Apparatus, and Method for Inspecting Processing Liquid Supply Device
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US12385125utility2025
Film Formation Apparatus
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US12365976utility2025
Film Forming Apparatus
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US12363801utility2025
Heat Treatment Device
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US12354854utility2025
Film Formation Apparatus
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US12354869utility2025
Substrate Treatment Method and Substrate Treatment Apparatus
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US12347699utility2025
Supply Tank, Supply Device and Supply System
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US12318803utility2025
Supply Device and Supply System
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US12278120utility2025
Substrate Treatment Device
0 cites
US12257595utility2025
Processing Liquid Supply Device, Substrate Processing Apparatus, and Processing Liquid Supply Method
0 cites
US12224250utility2025
Electromagnetic Wave Attenuator, Electronic Device, Film Formation Apparatus, and Film Formation Method
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US12165886utility2024
Substrate Processing Apparatus and Substrate Processing Method
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US12138671utility2024
Substrate Treatment Device
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US12109597utility2024
Substrate Treatment Device
0 cites
US12097541utility2024
Substrate Processing Apparatus
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US12074055utility2024
Substrate Treatment Device
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US12043898utility2024
Film Formation Apparatus and Moisture Removal Method Thereof
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US12005482utility2024
Substrate Treatment Device
0 cites

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