Patents/Assignees

SHIBAURA MECHATRONICS CORPORATION

28 patents in portfolio

US11996310utility2024
Substrate Carrying Apparatus
0 cites
US11955367utility2024
Film Formation Apparatus
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US11948812utility2024
Cooling Device, Substrate Treatment Device, Cooling Method, and Substrate Treatment Method
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US11906246utility2024
Organic Film Forming Apparatus
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US11784040utility2023
Substrate Treatment Device
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US11710707utility2023
Electromagnetic Wave Attenuator, Electronic Device, Film Formation Apparatus, and Film Formation Method
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US11670522utility2023
Processing Liquid Generator and Substrate Processing Apparatus Using the Same
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US11609491utility2023
Reflective Mask Cleaning Apparatus and Reflective Mask Cleaning Method
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