Patents/Assignees

Mattson Technology, Inc.

51 patents in portfolio

US11812523utility2023
Thermal Processing System with Transmission Switch Plate
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US11791166utility2023
Selective Etch Process Using Hydrofluoric Acid and Ozone Gases
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US11791181utility2023
Methods for the Treatment of Workpieces
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US11764072utility2023
Method for Processing a Workpiece Using a Multi-cycle Thermal Treatment Process
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US11749509utility2023
Temperature Control Using Temperature Control Element Coupled to Faraday Shield
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US11721539utility2023
Arc Lamp with Forming Gas for Thermal Processing Systems
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US11699603utility2023
Thermal Processing System with Temperature Non-uniformity Control
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US11651977utility2023
Processing of Workpieces Using Fluorocarbon Plasma
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US11644817utility2023
Control System for Adaptive Control of a Thermal Processing System
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US11626269utility2023
Chamber Seasoning to Improve Etch Uniformity by Reducing Chemistry
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US11610824utility2023
Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
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