Patents/Assignees

Mattson Technology, Inc.

51 patents in portfolio

US12261073utility2025
Electrostatic Chuck Assembly for Plasma Processing Apparatus
0 cites
US12183558utility2024
Workpiece Processing Apparatus with Thermal Processing Systems
0 cites
US12174616utility2024
Control System for Adaptive Control of a Thermal Processing System
0 cites
US12159770utility2024
Cooled Shield for ICP Source
0 cites
US12159789utility2024
Atomic Layer Etch Process Using Plasma in Conjunction with a Rapid Thermal Activation Process
0 cites
US12148608utility2024
Post Etch Defluorination Process
0 cites
US12119216utility2024
Arc Lamp with Forming Gas for Thermal Processing Systems
0 cites
US12119254utility2024
Electrostatic Chuck Assembly for Plasma Processing Apparatus
0 cites
US12087608utility2024
Transfer Apparatus and Processing System
0 cites
US12068177utility2024
Rapid Thermal Processing System with Cooling System
0 cites
US12046489utility2024
Workpiece Processing Apparatus with Thermal Processing Systems
0 cites
US12040159utility2024
Dual Frequency Matching Circuit for Inductively Coupled Plasma (ICP) Loads
0 cites
US12009184utility2024
Lift Pin Assembly for a Plasma Processing Apparatus
0 cites
US12009220utility2024
Method for Processing Workpiece, Plasma Processing Apparatus and Semiconductor Device
0 cites
US11955315utility2024
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
0 cites
US11955388utility2024
Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
0 cites
US11923215utility2024
Systems and Methods for Workpiece Processing
0 cites
US11848204utility2023
Enhanced Ignition in Inductively Coupled Plasmas for Workpiece Processing
0 cites
US11837447utility2023
Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
0 cites
US11837493utility2023
Electrostatic Chuck Assembly for Plasma Processing Apparatus
0 cites

← PreviousPage 2 of 3Next →