Patents/Assignees

Gigaphoton Inc.

85 patents in portfolio

US12592538utility2026
Solid-state Laser System, Phase Matching Method, and Electronic Device Manufacturing Method
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US12578656utility2026
EUV Light Generation Apparatus and Electronic Device Manufacturing Method
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US12579217utility2026
Training Data Creation Method, Machine Learning Method, Consumable Management Device, and Computer Readable Medium
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US12581585utility2026
Tilt Stage, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
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US12571680utility2026
Wavelength Measurement Apparatus, Narrowed-line Laser Apparatus, and Method for Manufacturing Electronic Devices
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US12573817utility2026
Exposure System, Exposure Method, and Electronic Device Manufacturing Method
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US12567713utility2026
Discharge Electrode, Method for Manufacturing Anode, and Method for Manufacturing Electronic Devices
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US12554202utility2026
EUV Light Generation Apparatus and Electronic Device Manufacturing Method
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US12550245utility2026
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
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US12542412utility2026
Gas Laser Device and Electronic Device Manufacturing Method
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US12532401utility2026
EUV Light Generation System and Electronic Device Manufacturing Method
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US12512640utility2025
Laser System, Pulse Laser Light Generating Method, and Electronic Device Manufacturing Method
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US12512641utility2025
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
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US12513808utility2025
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
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US12504694utility2025
Extreme Ultraviolet Light Generation Chamber Device and Electronic Device Manufacturing Method
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US12494616utility2025
Control Method of Discharge-excitation Type Laser Device, Discharge-excitation Type Laser Device, and Electronic Device Manufacturing Method
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US12455231utility2025
EUV Light Generation Apparatus, Electronic Device Manufacturing Method, and Inspection Method
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US12438327utility2025
Bypass Apparatus, Laser Apparatus, and Electronic Device Manufacturing Method
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US12438333utility2025
Line Narrowing Gas Laser Device, Wavelength Control Method, and Electronic Device Manufacturing Method
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US12439503utility2025
Target Supply Device and Electronic Device Manufacturing Method
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