Patents/Assignees

AUROS TECHNOLOGY, Inc.

28 patents in portfolio

US12591997utility2026
Arrangement Device and Method
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US12553712utility2026
Focus Optimization for Wafer Which Has Multi-peak Focus
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US12482688utility2025
Overlay Measurement Device and Method, and System and Program Therefor
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US12483765utility2025
Image Acquisition Method and Device
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US12474644utility2025
Device and Method for Overlay Measurement Which Control Focus Movement
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US12341047utility2025
Overlay Measurement Device and Method, and System and Program Therefor
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US12334382utility2025
Overlay Measurement Device and Method, and System and Program Therefor
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US12244926utility2025
Overlay Measurement Device and Method for Controlling Focus Movement and Program Storage Medium Therefor
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US12235590utility2025
Computer-readable Storage Medium Recording Data Structure for Storing Data Controlling Operation of Overlay Measurement Device and Overlay Measurement Device Therefor
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US12169364utility2024
Computer-readable Storage Medium Recording Data Structure for Storing Data Controlling Operation of Overlay Measurement Device and Overlay Measurement Device Therefor
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US12169365utility2024
Computer-readable Storage Medium Recording Data Structure for Storing Data Controlling Operation of Overlay Measurement Device and Overlay Measurement Device Therefor
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US12105028utility2024
Apparatus for Generating Model for Spectroscopic Ellipsometry Constant Analysis and Method Therefor
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US12107052utility2024
Overlay Mark Forming Moire Pattern, Overlay Measurement Method Using Same, Overlay Measurement Apparatus Using Same, and Manufacturing Method of Semiconductor Device Using Same
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US12085383utility2024
Overlay Measurement Device
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US12066331utility2024
Polarization Analysis Apparatus and Method for Adjusting Angle of Incidence or Numerical Aperture Using Aperture
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US12021040utility2024
Overlay Mark Forming Moire Pattern, Overlay Measurement Method Using Same, and Manufacturing Method of Semiconductor Device Using Same
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US12009243utility2024
Overlay Measurement Device and Method, and System and Program Therefor
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US12010425utility2024
Overlay Measurement Device and Method for Controlling Focus Movement and Program Storage Medium Therefor
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US12001146utility2024
Overlay Measurment Device
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US12002249utility2024
Deep Learning-based Overlay Key Centering System and Method Thereof
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