Patents/Assignees

AUROS TECHNOLOGY, Inc.

28 patents in portfolio

US11971248utility2024
Wavelength-tunable Fiber Optic Light Source and Overlay Measurement Device with Same
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US11960214utility2024
Computer-readable Storage Medium Recording Data Structure for Storing Data Controlling Operation of Overlay Measurement Device and Overlay Measurement Device Therefor
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US11874104utility2024
Apparatus for Transferring Optical Instrument
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US11847777utility2023
Correlation-based Overlay Key Centering System and Method Thereof
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US11835447utility2023
Method for Measuring Characteristic of Thin Film
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US11835865utility2023
Overlay Measurement Apparatus
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US11781996utility2023
Overlay Measuring Device and Method for Controlling Focus and Program Therefor
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US11604421utility2023
Overlay Mark, Overlay Measurement Method and Semiconductor Device Manufacturing Method Using the Overlay Mark
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