Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US11543814utility2023
Methods of Modelling Systems or Performing Predictive Maintenance of Lithographic Systems
0 cites
US8345225utility2013
Controllable Radiation Lithographic Apparatus and Method
0 cites
US8345265utility2013
Lithographic Apparatus and Methods for Compensating Substrate Unflatness, Determining the Effect of Patterning Device Unflatness, and Determining the Effect of Thermal Loads on a Patterning Device
0 cites
US8345223utility2013
Optical Element, Lithographic Apparatus Including Such an Optical Element, Device Manufacturing Method, and Device Manufactured Thereby
0 cites
US8345218utility2013
Immersion Lithographic Apparatus, Drying Device, Immersion Metrology Apparatus and Device Manufacturing Method
0 cites
US8345245utility2013
Lithographic Apparatus with Multiple Alignment Arrangements and Alignment Measuring Method
0 cites
US8345231utility2013
Method of Determining Defects in a Substrate and Apparatus for Exposing a Substrate in a Lithographic Process
0 cites
US8344341utility2013
Lithographic Apparatus and Device Manufacturing Method
0 cites

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ASML Netherlands B.V. Patents — 728 US Patents | Patents.us