Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US11569628utility2023
Pulse Stretcher and Method
0 cites
US11561478utility2023
Determining Subset of Components of an Optical Characteristic of Patterning Apparatus
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US11561479utility2023
Electronic System, Accelerometer, Calibration Method, Lithographic Apparatus and Device Manufacturing Method
0 cites
US11561480utility2023
System and Method for Inspecting a Wafer
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US11563298utility2023
Hollow-core Photonic Crystal Fiber Based Broadband Radiation Generator
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US11561477utility2023
Training Methods for Machine Learning Assisted Optical Proximity Error Correction
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US11562884utility2023
Current Source Apparatus and Method
0 cites
US11556064utility2023
Stage Apparatus and Method for Calibrating an Object Loading Process
0 cites
US11556066utility2023
Stage System and Lithographic Apparatus
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US11556044utility2023
Hollow-core Photonic Crystal Fiber Based Optical Component for Broadband Radiation Generation
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US11557455utility2023
Charged Particle Source Module
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US11556067utility2023
Contamination Trap
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US11556068utility2023
Detection System for an Alignment Sensor
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US11556060utility2023
Method of Calibrating a Plurality of Metrology Apparatuses, Method of Determining a Parameter of Interest, and Metrology Apparatus
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US11556063utility2023
Substrate Support, Lithographic Apparatus and Loading Method
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US11550227utility2023
Projection System and Lithographic Apparatus Comprising Said Projection System
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US11553582utility2023
Optical Isolation Module
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US11550234utility2023
Object in a Lithographic Apparatus
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US11543756utility2023
Lithographic Apparatus and Method
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US11544440utility2023
Machine Learning Based Inverse Optical Proximity Correction and Process Model Calibration
0 cites

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