Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US12007700utility2024
Metrology System and Method for Determining a Characteristic of One or More Structures on a Substrate
0 cites
US12007219utility2024
Laser Triangulation Apparatus and Calibration Method
0 cites
US12007697utility2024
Method for Process Metrology
0 cites
US12007590utility2024
Two-dimensional Diffraction Grating
0 cites
US12001135utility2024
Method of Manufacturing a Membrane Assembly
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US11999645utility2024
Optical Fibers and Production Methods Therefor
0 cites
US12001149utility2024
Component for Use in a Lithographic Apparatus, Method of Protecting a Component and Method of Protecting Tables in a Lithographic Apparatus
0 cites
US11996263utility2024
Stage Apparatus
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US11994806utility2024
Metrology Method and Apparatus, Computer Program and Lithographic System
0 cites
US11994845utility2024
Determining a Correction to a Process
0 cites
US11994848utility2024
Systems and Methods for Adjusting Prediction Models Between Facility Locations
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US11996262utility2024
Fluid Transfer System in a Charged Particle System
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US11996267utility2024
Particle Beam Apparatus, Defect Repair Method, Lithographic Exposure Process and Lithographic System
0 cites
US11988967utility2024
Target Material Supply Apparatus and Method
0 cites
US11988307utility2024
Anti-rotation Fluid Connection
0 cites
US11988971utility2024
Lithographic Apparatus, Substrate Table, and Method
0 cites
US11982948utility2024
Method for Determining a Center of a Radiation Spot, Sensor and Stage Apparatus
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US11984236utility2024
Radiation System
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US11984295utility2024
Charged Particle Assessment Tool, Inspection Method
0 cites
US11977326utility2024
Pellicle for EUV Lithography
0 cites

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