Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US12044980utility2024
Method of Manufacturing Devices
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US12044951utility2024
Illumination Source and Associated Metrology Apparatus
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US12044979utility2024
Computational Metrology Based Sampling Scheme
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US12044981utility2024
Method and Apparatus for Optimization of Lithographic Process
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US12040187utility2024
In-die Metrology Methods and Systems for Process Control
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US12038694utility2024
Determining Pattern Ranking Based on Measurement Feedback from Printed Substrate
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US12031909utility2024
Metrology Method for Measuring an Exposed Pattern and Associated Metrology Apparatus
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US12033830utility2024
Multiple Charged-particle Beam Apparatus with Low Crosstalk
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US12032305utility2024
Alignment Method and Associated Alignment and Lithographic Apparatuses
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US12032301utility2024
Substrate Support, Lithographic Apparatus and Loading Method
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US12032299utility2024
Metrology Method and Associated Metrology and Lithographic Apparatuses
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US12032297utility2024
Method for Monitoring Lithographic Apparatus
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US12032296utility2024
Fluid Handling System, Method and Lithographic Apparatus
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US12030772utility2024
MEMS Image Forming Element with Built-in Voltage Generator
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US12028000utility2024
Object Table Comprising an Electrostatic Clamp
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US12025925utility2024
Metrology Method and Lithographic Apparatuses
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US12019377utility2024
Target for Measuring a Parameter of a Lithographic Process
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US12013647utility2024
Metrology Method
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US12007699utility2024
Vessel for a Radiation Source
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US12007701utility2024
Determining a Mark Layout Across a Patterning Device or Substrate
0 cites

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