Patents/Assignees

ASML Netherlands B.V.

728 patents in portfolio

US12278081utility2025
System and Method for Alignment of Secondary Beams in Multi-beam Inspection Apparatus
0 cites
US12276921utility2025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
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US12276919utility2025
Method for Controlling a Semiconductor Manufacturing Process
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US12271108utility2025
Apparatus for Positioning and Clamped Curing
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US12273986utility2025
Target Delivery System
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US12271114utility2025
Method and Apparatus for Predicting Substrate Image
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US12271008utility2025
Transmissive Diffusor
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US12270647utility2025
Method for Calibration of an Optical Measurement System and Optical Measurement System
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US12270644utility2025
Compact Dual Pass Interferometer for a Plane Mirror Interferometer
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US12269229utility2025
Reflector Manufacturing Method and Associated Reflector
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US12265337utility2025
Exposure Apparatus
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US12265229utility2025
Method and Apparatus for Coherence Scrambling in Metrology Applications
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US12259546utility2025
Micromirror Arrays
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US12259659utility2025
Aligning a Distorted Image
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US12259664utility2025
Method of Designing an Alignment Mark
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US12253807utility2025
Height Measurement Method and Height Measurement System
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US12255042utility2025
Numerically Compensating Sem-induced Charging Using Diffusion-based Model
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US12254392utility2025
Apparatus and Method for Property Joint Interpolation and Prediction
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US12249535utility2025
Substrate Holder for Use in a Lithographic Apparatus
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US12249481utility2025
Stage Anti-fretting Mechanism for Roller Bearing Lifetime Improvement
0 cites

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