- US12136549utility2024Plasma-enhanced Chemical Vapor Deposition of Carbon Hard-mask0 cites
- US12136544utility2024Etch Uniformity Improvement for Single Turn Internal Coil PVD Chamber0 cites
- US12136538utility2024Deposition Chamber System Diffuser with Increased Power Efficiency0 cites
- US12128446utility2024High Speed Substrate Sorter0 cites
- USD1049067design2024Ring for an Anti-rotation Process Kit for a Substrate Processing Chamber0 cites
- US12131952utility2024Wafer Dicing Using Femtosecond-based Laser and Plasma Etch0 cites
- US12131934utility2024Semiconductor Substrate Support Leveling Apparatus0 cites
- US12131948utility2024Techniques for Void-free Material Depositions0 cites
- US12131903utility2024Pulsed-plasma Deposition of Thin Film Layers0 cites
- US12131930utility2024Inspection System0 cites
- US12131913utility2024Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers0 cites
- US12131900utility2024Methods for Depositing Blocking Layers on Metal Surfaces0 cites
- US12131105utility2024Virtual Measurement of Conditions Proximate to a Substrate with Physics-informed Compressed Sensing0 cites
- US12130606utility2024Disturbance Compensation for Substrate Processing Recipes0 cites
- US12130561utility2024Gas Distribution Plate with UV Blocker0 cites
- US12130465utility2024Variable Height Slanted Grating Method0 cites
- US12128524utility2024Membrane for Carrier Head with Segmented Substrate Chuck0 cites
- US12128456utility2024Megasonic Clean with Cavity Property Monitoring0 cites
- US12125734utility2024Vacuum Seal for Electrostatic Chuck0 cites