- US11693053utility2023Bode Fingerprinting for Characterizations and Failure Detections in Processing Chamber0 cites
- US11693435utility2023Ethercat Liquid Flow Controller Communication for Substrate Processing Systems0 cites
- US11694331utility2023Capture and Storage of Magnified Images0 cites
- US11694876utility2023Apparatus and Method for Delivering a Plurality of Waveform Signals During Plasma Processing0 cites
- US11694879utility2023Component, Method of Manufacturing the Component, and Method of Cleaning the Component0 cites
- US11694897utility2023Backside Wafer Dopant Activation0 cites
- US11694902utility2023Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers0 cites
- US11694908utility2023Gasbox for Semiconductor Processing Chamber0 cites
- US11694912utility2023High Pressure and High Temperature Anneal Chamber0 cites
- US11694919utility2023Vacuum Chuck Pressure Control System0 cites
- US11695060utility2023Ion Implantation to Form Trench-bottom Oxide of MOSFET0 cites
- US11696433utility20233D Pitch Multiplication0 cites
- US11688188utility2023System for Automatic Tumor Detection and Classification0 cites
- US11686005utility2023Electroplating Systems and Methods with Increased Metal Ion Concentrations0 cites
- US11685990utility2023Textured Processing Chamber Components and Methods of Manufacturing Same0 cites
- US11685014utility2023Formulations for Advanced Polishing Pads0 cites
- US11684941utility2023Showerhead with Embedded Nut0 cites
- US11688616utility2023Integrated Substrate Measurement System to Improve Manufacturing Process Performance0 cites
- US11688618utility2023Method and Apparatus for Continuous Substrate Cassette Loading0 cites