- US11830760utility2023Servo-control System0 cites
- US11830739utility2023Techniques to Increase CMOS Image Sensor Well Depth by Cyrogenic Ion Channeling of Ultra High Energy Ions0 cites
- US11830734utility2023Thermal Deposition of Silicon-germanium0 cites
- US11830729utility2023Low-k Boron Carbonitride Films0 cites
- US11830728utility2023Methods for Seamless Gap Filling of Dielectric Material0 cites
- US11830725utility2023Method of Cleaning a Structure and Method of Depositing a Capping Layer in a Structure0 cites
- US11830710utility2023Internally Divisible Process Chamber Using a Shutter Disk Assembly0 cites
- US11830706utility2023Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity0 cites
- US11829873utility2023Predictive Modeling of a Manufacturing Process Using a Set of Trained Inverted Models0 cites
- US11829073utility2023Large Area Self Imaging Lithography Based on Broadband Light Source0 cites
- US11828656utility2023Reflector Plate for Substrate Processing0 cites
- US11827999utility2023Methods of Forming Silicon Carbide Coated Base Substrates at Multiple Temperatures0 cites
- US11827514utility2023Amorphous Silicon-based Films Resistant to Crystallization0 cites
- US11826876utility2023Hydrophilic and Zeta Potential Tunable Chemical Mechanical Polishing Pads0 cites
- US11826875utility2023Window in Thin Polishing Pad0 cites
- US11826873utility2023Apparatus and Methods for Susceptor Deposition Material Removal0 cites
- US11826872utility2023Temperature and Slurry Flow Rate Control in CMP0 cites
- US11821082utility2023Reduced Defect Deposition Processes0 cites
- US11819847utility2023Nanofluidic Device with Silicon Nitride Membrane0 cites
- US11819948utility2023Methods to Fabricate Chamber Component Holes Using Laser Drilling0 cites