- US11835974utility2023Pressure Regulated Flow Controller0 cites
- US11837479utility2023Advanced Temperature Control for Wafer Carrier in Plasma Processing Chamber0 cites
- US11837680utility2023Substrate Structuring Methods0 cites
- US11837478utility2023Temperature-controllable Process Chambers, Electronic Device Processing Systems, and Manufacturing Methods0 cites
- US11837683utility2023Indium-gallium-nitride Light Emitting Diodes with Increased Red-light Quantum Efficiency0 cites
- US11833580utility2023Deposition of Reactive Metals with Protection Layer for High Volume Manufacturing0 cites
- US11833637utility2023Control of Steam Generation for Chemical Mechanical Polishing0 cites
- US11837473utility2023Methods for Near Surface Work Function Engineering0 cites
- US11834740utility2023Apparatus, System, and Method for Generating Gas for Use in a Process Chamber0 cites
- US11834743utility2023Segmented Showerhead for Uniform Delivery of Multiple Precursors0 cites
- US11834744utility2023Ceramic Showerheads with Conductive Electrodes0 cites
- US11837464utility2023Methods, Systems, and Apparatus for Tape-frame Substrate Cleaning and Drying0 cites
- US11835146utility2023Symmetric Flow Valve for Flow Conductance Control0 cites
- US11837448utility2023High-temperature Chamber and Chamber Component Cleaning and Maintenance Method and Apparatus0 cites
- US11835927utility2023Reducing Substrate Surface Scratching Using Machine Learning0 cites
- US11837285utility2023Bias Temperature Instability Correction in Memory Arrays0 cites
- US11836913utility2023Film Thickness Estimation from Machine Learning Based Processing of Substrate Images0 cites
- US11827980utility2023Isolator Apparatus and Methods for Substrate Processing Chambers0 cites
- US11830824utility2023Edge Protection on Semiconductor Substrates0 cites
- US11830779utility2023In-situ Etch Material Selectivity Detection System0 cites