Cover Ring of Top Plate for Semiconductor Manufacturing Apparatus

FIG. 1 is a perspective view of a cover ring of top plate for semiconductor manufacturing apparatus showing our new design;

FIG. 2 is another perspective view thereof;

FIG. 3 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 4 is a right-side elevational view thereof, the left-side elevational view being a mirror image thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taken along line 7 - 7 of FIG. 5 .

The dot-dash lines in the drawings illustrate boundaries of sectional views and form no part of the claimed design.