Rotor for Semiconductor Manufacturing Device

FIG. 1 is a perspective view of a rotor for semiconductor manufacturing device, showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a top plan view thereof; and,

FIG. 4 is a bottom plan view thereof.

All sides not shown form no part of the claimed design. The broken lines form no part of the claimed design.