Support Pipe for an Interlocking Process Kit for a Substrate Processing Chamber

FIG. 1 is a top, front, right isometric view of a support pipe for an interlocking process kit for a substrate processing chamber, showing our new design.

FIG. 2 is a bottom, left, back isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a right side elevation view thereof.

FIG. 8 is a left side elevation view thereof; and,

FIG. 9 is an enlarged cross-sectional view taken along line 9 - 9 in FIG. 3 .

The dashed lines in FIGS. 1 - 9 represent unclaimed environment and form no part of the claimed design.