Dynamic Vacuum Seal System Isolation Ring for Physical…

FIG. 1 is a bottom perspective view of a dynamic vacuum seal system isolation ring for physical vapor deposition sputter applications of the present invention; FIG. 2 is a top perspective view thereof; FIG. 3 is a bottom view thereof; FIG. 4 is a top view thereof; FIG. 5 is a bottom sectional view thereof; FIG. 6 is a top sectional view thereof; FIG. 7 is a right side view thereof, wherein the front view, rear view, and left side view are all mirror images thereof; and, FIG. 8 is a cross-sectional inner view taken along line 8 - 8 of FIG. 3 thereof. The ornamental design which is claimed is shown in solid lines in the drawings. Any broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.

Citations

This patent cites (93)

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Dynamic Vacuum Seal System Isolation Ring for Physical Vapor Deposition Sputter Applications

Claims (1)

Full Description

Citations

This patent cites (93)