Patents/Inventors

Zuoming Zhu

Sunnyvale, CAUS16 patents

14 Patents

US125936432026
Batch Thermal Process Chamber
Applied Materials, Inc.
0 cites
US125404002026
Multi-flow Gas Circuits, Processing Chambers, and Related Apparatus and Methods for Semiconductor Manufacturing
APPLIED MATERIALS, Inc.
0 cites
US124671442025
Methods of Correlating Zones of Processing Chambers, and Related Systems and Methods
APPLIED MATERIALS, Inc.
0 cites
US124493092025
Methods for Detection Using Optical Emission Spectroscopy
Applied Materials, Inc.
0 cites
US124287312025
Flow Guide Structures and Heat Shield Structures, and Related Methods, for Deposition Uniformity and Process Adjustability
APPLIED MATERIALS, Inc.
0 cites
US124009042025
Thermal Processing Susceptor
Applied Materials, Inc.
0 cites
US123343412025
Chamber Body Feedthrough for in Chamber Resistive Heating Element
Applied Materials, Inc.
0 cites
US121966172025
Temperature Profile Measurement and Synchronized Control on Substrate and Susceptor in an Epitaxy Chamber
Applied Materials, Inc.
0 cites
US121632292024
Multi Zone Spot Heating in EPI
Applied Materials, Inc.
0 cites
US121659342024
Substrate Processing Monitoring
Applied Materials, Inc.
0 cites
US118609732024
Method and System for Foreline Deposition Diagnostics and Control
Applied Materials, Inc.
0 cites
US118482262023
Thermal Processing Susceptor
Applied Materials, Inc.
0 cites
US118210882023
Multi Zone Spot Heating in EPI
Applied Materials, Inc.
0 cites
US117330812023
Methods, Systems, and Apparatus for Conducting a Calibration Operation for a Plurality of Mass Flow Controllers (mfcs) of a Substrate Processing System
Applied Materials, Inc.
0 cites