Patents/Inventors

Zili Zhou

VeldhovenNL8 patents

4 Patents

US126188042026
Methods and Apparatus for Acoustic Metrology
ASML Netherlands B.V.
0 cites
US123266692025
Illumination Apparatus and Associated Metrology and Lithographic Apparatuses
ASML Netherlands B.V.
0 cites
US122652292025
Method and Apparatus for Coherence Scrambling in Metrology Applications
ASML Netherlands B.V.
0 cites
US122099942025
Method and Metrology Tool for Determining Information About a Target Structure, and Cantilever Probe
ASML NETHERLANDS B.V.
0 cites