Zhuangxiong Huang

7 Patents

• US126191652026

  Electrostatic Holder, Object Table and Lithographic Apparatus

  ASML Netherlands B.V.

  0 cites
• US124114252025

  Fluid Purging System

  ASML Netherlands B.V.

  0 cites
• US123460312025

  Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method

  ASML Netherlands B.V.

  0 cites
• US123325702025

  Lithographic System Provided with a Deflection Apparatus for Changing a Trajectory of Particulate Debris

  ASML Netherlands B.V.

  0 cites
• US122926962025

  Fluid Purging System, Projection System, Illumination System, Lithographic Apparatus, and Method

  ASML Netherlands B.V.

  0 cites
• US121587052024

  End-of-life Monitoring of Dynamic Gas Lock Membranes and Pupil Facet Mirrors and Detection of Membrane Rupture in Lithographic Apparatuses

  ASML Holding N.V. & ASML Netherlands B.V.

  0 cites
• US117037682023

  Lithographic Apparatus and Related Methods

  ASML Netherlands B.V.

  0 cites