Patents/Inventors

Zhongkui Tan

Fremont, CAUS8 patents

8 Patents

US125819172026
Matching Pre-processing and Post-processing Substrate Samples
Lam Research Corporation
0 cites
US124379662025
Systems and Methods for Reverse Pulsing
Lam Research Corporation
0 cites
US122179552025
Method for Etching Features Using a Targeted Deposition for Selective Passivation
Lam Research Corporation
0 cites
US121658722024
Methods and Systems for Advanced Ion Control for Etching Processes
Lam Research Corporation
0 cites
US121658782024
Semiconductor Mask Reshaping Using a Sacrificial Layer
Lam Research Corporation
0 cites
US117987852023
Systems for Reverse Pulsing
Lam Research Corporation
0 cites
US117422122023
Directional Deposition in Etch Chamber
Lam Research Corporation
0 cites
US116462072023
Silicon Oxide Silicon Nitride Stack Stair Step Etch
Lam Research Corporation
0 cites