15 Patents
- US126092642026Apparatus Using Enhanced Deflectors to Manipulate Charged Particle Beams
ASML Netherlands B. V.
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- US120805132024Cross-talk Cancellation in Multiple Charged-particle Beam Inspection
ASML Netherlands B.V.
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- US118154732023Methods of Inspecting Samples with Multiple Beams of Charged Particles
ASML Netherlands B.V.
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- US115943952023Pixel Shape and Section Shape Selection for Large Active Area High Speed Detector
ASML Netherlands B.V.
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