Patents/Inventors

Zhong-wei Chen

Los Altos, CAUS31 patents

23 Patents

US126205492026
Dynamic Determination of a Sample Inspection Recipe of Charged Particle Beam Inspection
ASML Netherlands B.V.
0 cites
US124930062025
Systems and Methods for Signal Electron Detection
ASML Netherlands B.V.
0 cites
US124630102025
Multiple Charged-particle Beam Apparatus and Methods
ASML Netherlands B.V.
0 cites
US124513212025
Apparatus for Obtaining Optical Measurements in a Charged Particle Apparatus
ASML Netherlands B.V.
0 cites
US123548332025
Multiple Landing Energy Scanning Electron Microscopy Systems and Methods
ASML Netherlands B.V.
0 cites
US123476432025
Multiple Charged-particle Beam Apparatus and Methods of Operating the Same Using Movable Lenses
ASML Netherlands B.V.
0 cites
US123082052025
Beam Current Adjustment for Charged-particle Inspection System
ASML Netherlands B.V.
0 cites
US122780812025
System and Method for Alignment of Secondary Beams in Multi-beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US122437092025
Apparatus Using Multiple Charged Particle Beams
ASML Netherlands B.V.
0 cites
US122371442025
Apparatus Using Multiple Beams of Charged Particles
ASML Netherlands B.V.
0 cites
US122116692025
Multiple Charged-particle Beam Apparatus with Low Crosstalk
ASML Netherlands B.V.
0 cites
US121966922025
Systems and Methods for Voltage Contrast Defect Detection
ASML Netherlands B.V.
0 cites
US120401872024
In-die Metrology Methods and Systems for Process Control
ASML Netherlands B.V.
0 cites
US119616972024
Apparatus Using Charged Particle Beams
ASML Netherlands B.V.
0 cites
USRE0497842024
Apparatus of Plural Charged-particle Beams
ASML Netherlands B.V.
0 cites
US118547652023
Multiple Charged-particle Beam Apparatus and Methods
ASML Netherlands B.V.
0 cites
US118154732023
Methods of Inspecting Samples with Multiple Beams of Charged Particles
ASML Netherlands B.V.
0 cites
US118043562023
Apparatus Using Multiple Beams of Charged Particles
ASML Netherlands B.V.
0 cites
US117215212023
Multi-beam Inspection Apparatus with Improved Detection Performance of Signal Electrons
ASML Netherlands B.V.
0 cites
US116885792023
Electron Emitter and Method of Fabricating Same
ASML Netherlands B.V.
0 cites
US116767932023
Apparatus of Plural Charged Particle Beams
ASML Netherlands B.V.
0 cites
US116704772023
Apparatus Using Charged Particle Beams
ASML Netherlands B.V.
0 cites
US115943962023
Multi-beam Inspection Apparatus with Single-beam Mode
ASML Netherlands B.V.
0 cites