Patents/Inventors

Zhiwen Kang

San Jose, CAUS7 patents

7 Patents

US125605562026
Method and System of Sample Edge Detection and Sample Positioning for Image Inspection Apparatus
ASML Netherlands B.V.
0 cites
US123927322025
Multi-source Illumination Unit and Method of Operating the Same
ASML Netherlands B.V.
0 cites
US122179272025
Beam Manipulation of Advanced Charge Controller Module in a Charged Particle System
ASML Netherlands B.V.
0 cites
US121424562024
Self-differential Confocal Tilt Sensor for Measuring Level Variation in Charged Particle Beam System
ASML NETHERLANDS B.V.
0 cites
US120721812024
Inspection Apparatus and Method
ASML NETHERLANDS B.V.
0 cites
US118089302023
Optical Objective Lens
ASML Netherlands B.V.
0 cites
US116825382023
Optical System with Compensation Lens
ASML Netherlands B.V.
0 cites