Patents/Inventors

Zhengquan Tan

Milpitas, CAUS3 patents

4 Patents

US123796722025
Metrology of Nanosheet Surface Roughness and Profile
KLA Corporation
0 cites
US117963902023
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic Metrology
KLA Corporation
0 cites
US115730772023
Scatterometry Based Methods and Systems for Measurement of Strain in Semiconductor Structures
KLA Corporation
0 cites
US115556892023
Measuring Thin Films on Grating and Bandgap on Grating
Kla-tencor Corporation
0 cites