Patents/Inventors

Zhengkai Lu

ShanghaiCN1 patent

2 Patents

US123729882025
Method of Controlling Mixed Liquid to Be Delivered for SPM Solution
ULTRON SEMICONDUCTOR (SHANGHAI) CO., Ltd.
0 cites
US123343682025
Liquid Delivering System for Wafer Cleaning Equipment
ULTRON SEMICONDUCTOR (SHANGHAI) CO., Ltd.
0 cites