Zheng J. Ye

3 Patents

• US120573392024

  Bipolar Electrostatic Chuck to Limit DC Discharge

  Applied Materials, Inc.

  0 cites
• US119012092024

  High Temperature Bipolar Electrostatic Chuck

  Applied Materials, Inc.

  0 cites
• US115878172023

  High Temperature Bipolar Electrostatic Chuck

  Applied Materials, Inc.

  0 cites