Zhen Yu Guan

5 Patents

• US123410192025

  Anti-oxidation Layer to Prevent Dielectric Loss from Planarization Process

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US121912502025

  Method of Forming Bottom Electrode via for Memory Device

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US121070042024

  In-situ CMP Self-assembled Monolayer for Enhancing Metal-dielectric Adhesion and Preventing Metal Diffusion

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites
• US118548222023

  Anti-oxidation Layer to Prevent Dielectric Loss from Planarization Process

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US118108172023

  In-situ CMP Self-assembled Monolayer for Enhancing Metal-dielectric Adhesion and Preventing Metal Diffusion

  Taiwan Semiconductor Manufacturing Co., Ltd.

  0 cites