Patents/Inventors

Zhejun Zhang

Santa Clara, CAUS5 patents

4 Patents

US125903632026
Apparatus for Single Chamber Deposition and Etch
Applied Materials, Inc.
0 cites
US125867642026
Plasma Showerhead Treatment Methods
Applied Materials, Inc.
0 cites
US124420802025
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US115849862023
Area Selective CVD of Metallic Films Using Precursor Gases and Inhibitors
The Board Of Trustees Of The University Of Illinois
0 cites