Patents/Inventors

Zhe Gui

Beaverton, ORUS8 patents

9 Patents

US123593112025
Conformal Deposition of Silicon Carbide Films Using Heterogeneous Precursor Interaction
Lam Research Corporation
0 cites
US123314022025
Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites
US123343322025
Remote Plasma Based Deposition of Silicon Carbide Films Using Silicon-containing and Carbon-containing Precursors
Lam Research Corporation
0 cites
US122725472025
Conformal Deposition of Silicon Carbide Films
Novellus Systems, Inc.
0 cites
US121166692024
Integrated Showerhead with Improved Hole Pattern for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites
US120000472024
Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites
US118942272024
Conformal Deposition of Silicon Carbide Films
Novellus Systems, Inc.
0 cites
US117027482023
Wafer Level Uniformity Control in Remote Plasma Film Deposition
Lam Research Corporation
0 cites
US116085592023
Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites