23 Patents
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- US124671362025Process Characterization and Correction Using Optical Wall Process Sensor (OWPS)
Applied Materials, Inc.
0 cites - US124696862025Process Characterization and Correction Using Optical Wall Process Sensor (OWPS)
Applied Materials, Inc.
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- US124427652025Transmission Corrected Plasma Emission Using In-situ Optical Reflectometry
Applied Materials, Inc.
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- US123396452025Estimation of Chamber Component Conditions Using Substrate Measurements
Applied Materials, Inc.
0 cites - 0 cites
- US122164552025Chamber Component Condition Estimation Using Substrate Measurements
Applied Materials, Inc.
0 cites - US121911762025Integrated Substrate Measurement System to Improve Manufacturing Process Performance
Applied Materials, Inc.
0 cites - 0 cites
- US121365572024Integrated Substrate Measurement System to Improve Manufacturing Process Performance
Applied Materials, Inc.
0 cites - 0 cites
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- US120319102024Transmission Corrected Plasma Emission Using In-situ Optical Reflectometry
Applied Materials, Inc.
0 cites - 0 cites
- US120091912024Thin Film, In-situ Measurement Through Transparent Crystal and Transparent Substrate Within Processing Chamber Wall
Applied Materials, Inc.
0 cites - 0 cites
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- US116886162023Integrated Substrate Measurement System to Improve Manufacturing Process Performance
Applied Materials, Inc.
0 cites - 0 cites
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