11 Patents
- US125470812026Illumination Compensation Method
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US125052662025High-order Rotational Symmetry Unit-based Nonlinear Geometric Phase Metasurface
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - 0 cites
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- US122725302025Ultra-large Area Scanning Reactive Ion Etching Machine and Etching Method Thereof
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US121817942024Photolithography Method
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120929602024Mask Topology Optimization Method and System for Surface Plasmon Near-field Photolithography
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120857412024Method for Preparing Super-resolution Lens Based on Metal-dielectric Strip Array, and Using Method of Super-resolution Lens
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
0 cites - US120789372024Near-field Lithography Immersion System, Immersion Unit and Interface Module Thereof
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US117249622023Method for Etching Curved Substrate
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites - US116933202023Secondary Imaging Optical Lithography Method and Apparatus
The Institute Of Optics And Electronics, The Chinese Academy Of Sciences
0 cites