7 Patents
- US123946062025Impedance Control of Local Areas of a Substrate During Plasma Deposition Thereon in a Large PECVD Chamber
Applied Materials, Inc.
0 cites - US123811062025Systems and Methods of Seasoning Electrostatic Chucks with Dielectric Seasoning Films
Applied Materials, Inc.
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- US116462162023Systems and Methods of Seasoning Electrostatic Chucks with Dielectric Seasoning Films
Applied Materials, Inc.
0 cites - US115877892023System and Method for Radical and Thermal Processing of Substrates
Applied Materials, Inc.
0 cites